At the top, Himmler and Heydrich, with Eichmann as a kind of manager.
'On the ground' it was implemented mainly by the SS and paramilitary police units of the SD in the Einsatzgruppen, supplemented in some areas by local volunteers.
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the ghettos came before the final solution
The Final Solution (of the Jewish question).
The "Final Solution"
The Final Solution was not implemented in 1941. By the time of the Final Solution most of the ghettos had been cleared and the inhabitants murdered.
It refers to the Holocaust. 'The Final Solution to the Jewish question', it was the plan to murder the Jews of Europe.